A High Resolution Differential Mode-Localized MEMS Accelerometer (2019)

First Author: Pandit M
Attributed to:  CSIC Innovation and Knowledge Centre Phase 2 funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2019.2926651

Publication URI: http://dx.doi.org/10.1109/jmems.2019.2926651

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 5