A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz 1/2 Noise Floor (2019)
Attributed to:
Innovation and Knowledge Centre for Smart Infrastructure and Construction - Collaborative Programme Tranche 2
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2019.2908931
Publication URI: http://dx.doi.org/10.1109/jmems.2019.2908931
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 3