Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056426

Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056426

Type: Conference/Paper/Proceeding/Abstract