Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects (2021)
Attributed to:
The Physics and Technology of Photonic Metadevices and Metasystems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0048139
Publication URI: http://dx.doi.org/10.1063/5.0048139
Type: Journal Article/Review
Parent Publication: APL Photonics
Issue: 6