Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects (2021)

First Author: Rendón-Barraza C
Attributed to:  Next Generation Metrology Driven by Nanophotonics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0048139

Publication URI: http://dx.doi.org/10.1063/5.0048139

Type: Journal Article/Review

Parent Publication: APL Photonics

Issue: 6