Secondary ion mass spectrometry analysis of metal oxides using 70 keV argon, carbon dioxide, and water gas cluster ion beams (2023)
Attributed to:
Development of Multiplexed ToF-SIMS Instrumentation
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/6.0002591
Publication URI: http://dx.doi.org/10.1116/6.0002591
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B
Issue: 4