On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures (2024)

First Author: Sahoo P

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41598-024-58842-w

Publication URI: http://dx.doi.org/10.1038/s41598-024-58842-w

Type: Journal Article/Review

Parent Publication: Scientific Reports

Issue: 1