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Highly 28Si enriched silicon by localised focused ion beam implantation (2024)

First Author: Acharya R

Attributed to: Correlative Mapping of Crystal Orientation and Chemistry at the Nanoscale funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s43246-024-00498-0

Publication URI: http://dx.doi.org/10.1038/s43246-024-00498-0

Type: Journal Article/Review

Parent Publication: Communications Materials

Issue: 1