Highly 28Si enriched silicon by localised focused ion beam implantation (2024)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s43246-024-00498-0

Publication URI: http://dx.doi.org/10.1038/s43246-024-00498-0

Type: Journal Article/Review

Parent Publication: Communications Materials

Issue: 1