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Chromatic focus variation microscopy for surface metrology (2024)

First Author: Mustafa A

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.528285

Publication URI: http://dx.doi.org/10.1364/oe.528285

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 20

ISSN: 1094-4087