34C24DBC-1F25-48FC-87B9-DCF8B1070C55Printed Logic Supply Chain (FlexIC) - TSB App. No. 155Research GrantTS/I001158/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL42566412FC4C8C-AB63-4729-B406-5AE3A8719F73High-density remote plasma sputtering of high-dielectric-constant amorphous hafnium oxide films High-density remote plasma sputtering of amorphous HfO x filmsphysica status solidi (b)c7ff86d3fa97933679e15cbca69af6ebLi F2013-01-01http://dx.doi.org/10.1002/pssb.201248520http://dx.doi.org/10.1002/pssb.2012485205Journal Article/Reviewdoi_53cfc8fc8c536f0f