Localised laser joining of glass to silicon with BCB intermediate layer (2009)

First Author: Wu Q

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s00542-009-0879-1

Publication URI: http://dx.doi.org/10.1007/s00542-009-0879-1

Type: Journal Article/Review

Parent Publication: Microsystem Technologies

Issue: 7