Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators (2012)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.matlet.2011.09.003
Publication URI: http://dx.doi.org/10.1016/j.matlet.2011.09.003
Type: Journal Article/Review
Parent Publication: Materials Letters
Issue: 1