C4BA27D9-48FD-4D0C-B135-2E778B9F6B9EA chip device for on-line assessment in nano-scale surface manufactureResearch GrantEP/E03733X/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL456404E8E2CE56-0D16-461A-BE04-C3DFBFFE4C6DAn integrated optical coupler used in a fibre interferometry system for on-line surface measurementsOptics Communications4b8375f47000e2298aaad62e415d684bYang S2008-01-01http://dx.doi.org/10.1016/j.optcom.2007.10.067http://dx.doi.org/10.1016/j.optcom.2007.10.0675Journal Article/Reviewdoi_53d0030038a184db