High precision pressure sensors based on SAW devices in the GHz range (2013)

First Author: Rodríguez-Madrid J
Attributed to:  Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.sna.2012.09.012

Publication URI: http://dx.doi.org/10.1016/j.sna.2012.09.012

Type: Journal Article/Review

Parent Publication: Sensors and Actuators A: Physical