Wear of silicon surfaces in MEMS (2011)

First Author: Ku I

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.wear.2011.04.005

Publication URI: http://dx.doi.org/10.1016/j.wear.2011.04.005

Type: Journal Article/Review

Parent Publication: Wear

Issue: 7-8