A0360215-DA33-41D6-9A4D-6A6AB97EFFFALiquid injection ALD of Cp- based precursors for deposition of dielectric materialsResearch GrantEP/D068606/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL523614959F1AE5-9EA4-40D8-92F1-7B7DD7C9D8AFDielectric relaxation of lanthanum doped zirconium oxideJournal of Applied Physicsdcd2f88320855c9e0c59074101de3d8eZhao C2009-01-01http://dx.doi.org/10.1063/1.3078038http://dx.doi.org/10.1063/1.30780384Journal Article/Reviewdoi_53d03503505f2f1c