Multiphysics modelling and simulation of dry laser cleaning of micro-slots with particle contaminants (2012)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/45/13/135401
Publication URI: http://dx.doi.org/10.1088/0022-3727/45/13/135401
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 13