1D8D60EC-37E9-4D38-A17C-BFFA558640AFNanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)Research GrantEP/J009814/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL107085435270FC-F670-48CE-ADF3-D2A5B77E1F37Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films.Nanotechnologye2e7520d40a565cbf2ce6f56a17def92Hees J2013-01-01http://dx.doi.org/10.1088/0957-4484/24/2/02560123220817http://ukpmc.ac.uk/abstract/MED/232208170957-4484http://europepmc.org/abstract/MED/23220817242Journal Article/Reviewdoi_53d042042a9edd16