Lubrication of Microelectromechanical Devices Using Liquids of Different Viscosities (2012)

First Author: Ku I

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1115/1.4005819

Publication URI: http://dx.doi.org/10.1115/1.4005819

Type: Journal Article/Review

Parent Publication: Journal of Tribology

Issue: 1