Structural and optical properties of yttrium oxide thin films for planar waveguiding applications (2010)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.3503621

Publication URI: http://dx.doi.org/10.1116/1.3503621

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 6