Dependence of cryogenic strength of hydroxide catalysis bonded silicon on type of surface oxide (2013)

First Author: Beveridge N

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0264-9381/30/2/025003

Publication URI: http://dx.doi.org/10.1088/0264-9381/30/2/025003

Type: Journal Article/Review

Parent Publication: Classical and Quantum Gravity

Issue: 2