Titanium arsenide films from the atmospheric pressure chemical vapour deposition of tetrakisdimethylamidotitanium and tert-butylarsine. (2011)
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Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/c1dt10457h
PubMed Identifier: 21743910
Publication URI: http://europepmc.org/abstract/MED/21743910
Type: Journal Article/Review
Volume: 40
Parent Publication: Dalton transactions (Cambridge, England : 2003)
Issue: 40
ISSN: 1477-9226