Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validation (2014)

First Author: Goel S
Attributed to:  Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/47/27/275304

Publication URI: http://dx.doi.org/10.1088/0022-3727/47/27/275304

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 27