Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms. (2015)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1103/physrevlett.114.125002

PubMed Identifier: 25860749

Publication URI: http://europepmc.org/abstract/MED/25860749

Type: Journal Article/Review

Volume: 114

Parent Publication: Physical review letters

Issue: 12

ISSN: 0031-9007