Fabrication of a novel SEM microgripper by electrochemical and FIB techniques (2010)
Attributed to:
Basic Technology Nanorobotics : Transfer to applications, new science and industry
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/20/1/015028
Publication URI: http://dx.doi.org/10.1088/0960-1317/20/1/015028
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 1