Validation of pico-metre scale, multi-axis position sensing.

Anemos builds unique, patented multi-axis position sensors (MAPS) that can measure planar and angular coordinates to extreme resolutions with a single sensor. What is predicted through extensive simulations and now partially proven in practice not only goes well beyond our original sub-micron objectives, but apparently also stretches the limits of existing metrology setups. In particular, the ability to control motion and independently measure (validate) the result represents a huge challenge in the realm of sub-nanometre position sensing. This requires extraordinarily fine mechanical control, and exquisite control of temperature, vibration, and other environmental variables. In addition, credible validation needs to be done against traceable standards such as optical interferometers and at third-party labs.

The objective is an experimental system that can really test our technology to its limits in order to address new top-end market opportunities. Also, in pushing the envelope there is always much to learn about unforeseen weaknesses and limitations: the problem is not just to prove what we think we know, but to uncover what we don't.