Cardiff University and Edwards Vacuum KTP 21_22 R5
Lead Participant:
CARDIFF UNIVERSITY
Abstract
_Development of a microwave plasma device for the destruction of green-house gases used for semiconductor fabrication. This approach reduces the environmental impact that would arise from the release of the gases themselves and would have a lower carbon footprint than the combustion technology currently employed._
Lead Participant | Project Cost | Grant Offer |
|---|---|---|
| CARDIFF UNIVERSITY | ||
Participant |
||
| EDWARDS LIMITED |
People |
ORCID iD |
| Paul Thomas (Project Manager) |