Development on nano-imprint lithography stamps using DRIE PVD tungsten films
Lead Research Organisation:
University of Glasgow
Department Name: School of Physics and Astronomy
Abstract
Nanoimprint lithography (NIL) is a nonconventional lithographic technique for high-throughput patterning of polymer nanostructures at great precision and at low costs. Unlike conventional photo and electron based lithography a transmission mask is not used. Instead a stamp is formed that embosses a resist layer to form the structure in the resist. NIL has the promise of producing competitively sized structures, (sub-50 nm), but at substantially reduced cost of ownership. One of the draw backs of NIL, however, is the lifetime of the stamp (known as a template).
The project will look at the formation of a tungsten based template which has the promise of increase useful life with comparable high-resolution structures.
The authors have gained significant expertise in the formation of structures in tungsten films deposited on silicon substrates. The project will allow the authors to explore the suitability of tungsten as an NIL template. The ultimate structure size will be explored, with a target of less than 50 nm minimum feature size. A laboratory demonstrator will be produced and exercised on an NIL tool to form test patterns.
The project will look at the formation of a tungsten based template which has the promise of increase useful life with comparable high-resolution structures.
The authors have gained significant expertise in the formation of structures in tungsten films deposited on silicon substrates. The project will allow the authors to explore the suitability of tungsten as an NIL template. The ultimate structure size will be explored, with a target of less than 50 nm minimum feature size. A laboratory demonstrator will be produced and exercised on an NIL tool to form test patterns.
Description | We developed an understanding of how to produce nano-imprint lithography stamps using CVD tungsten. Such technology is used to make the silicon chips. |
Exploitation Route | I don't think so as the technical issues were too high. The research was to explore an alternative use of our etching technology. |
Sectors | Digital/Communication/Information Technologies (including Software),Manufacturing, including Industrial Biotechology |
Description | SET |
Organisation | Smart Equipment Technology |
Country | France |
Sector | Private |
PI Contribution | We are running trails of the nano-imprint stamps with SET in France. SET make thermal imprint equipment. |
Collaborator Contribution | They have allows us to run trails with their machines. The machine costs >£500k and we cut the in-kind contribution as a fraction of the machine cost and the time that they supported us on the trails. |
Impact | trails with nano-imprint stamps. Internal development work as of today. |
Start Year | 2017 |
Title | MICROMACHINED MECHANICAL PART AND METHODS OF FABRICATION THEREOF |
Description | The present invention relates primarily to a method of fabrication of one or more free-standing micromachined parts. The method includes performing reactive ion etching of photoresist and tungsten-based layers supported on a carrier substrate to thereby define one or more micromachined parts, followed by separating the resulting one or more micromachined parts from the carrier substrate such that the parts are free-standing. The invention also relates to tungsten-based microprobe obtainable by such a method, wherein the microprobe has a substantially square or rectangular cross-section in a direction perpendicular to a longitudinal axis of the microprobe, and to probe cards comprising a plurality of such microprobes. |
IP Reference | WO2022008436 |
Protection | Patent application published |
Year Protection Granted | 2022 |
Licensed | Yes |
Impact | Gu has formed a spin-out company and the IP has been licenced to them. |