The effect of oxygen incorporation in sputtered scandium nitride films (2008)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2008.05.050

Publication URI: http://dx.doi.org/10.1016/j.tsf.2008.05.050

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 23