Concepts and issues in piezo-on-3D silicon structures (2009)

First Author: Henry Sweet J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1108/02602280910986566

Publication URI: http://dx.doi.org/10.1108/02602280910986566

Type: Journal Article/Review

Parent Publication: Sensor Review

Issue: 4