Post processing of microstructures by PDMS spray deposition (2009)
Attributed to:
Platform Support for 3D Electrical MEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.sna.2009.08.029
Publication URI: http://dx.doi.org/10.1016/j.sna.2009.08.029
Type: Journal Article/Review
Parent Publication: Sensors and Actuators A: Physical
Issue: 2