Dual wavelength optical metrology using ptychography (2013)

First Author: Claus D

Attributed to: Laser Loan Pool Facility. funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2040-8978/15/3/035702

Publication URI: http://dx.doi.org/10.1088/2040-8978/15/3/035702

Type: Journal Article/Review

Parent Publication: Journal of Optics

Issue: 3