Non-destructive thickness characterization of Si based heterostructure by X-ray diffraction and reflectivity (2011)

First Author: Liu X

Attributed to: UK Silicon Photonics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.sse.2011.01.036

Publication URI: http://dx.doi.org/10.1016/j.sse.2011.01.036

Type: Journal Article/Review

Parent Publication: Solid-State Electronics

Issue: 1