ICP polishing of silicon for high-quality optical resonators on a chip (2012)

First Author: Laliotis A
Attributed to:  Atom Chips - Integrated Circuits for Nanoscale Manipulation of Cold Atoms funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/12/125011

Publication URI: http://dx.doi.org/10.1088/0960-1317/22/12/125011

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12