Lithography scaling issues associated with III-V MOSFETs (2010)

First Author: Ignatova O

Attributed to: III-V MOSFETs for Ultimate CMOS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2009.11.093

Publication URI: http://dx.doi.org/10.1016/j.mee.2009.11.093

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering

Issue: 5-8