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Fullerene Resist Materials for the 32 nm Node and Beyond (2008)

First Author: Gibbons F

Attributed to: Materials Program Platform Grant: Nanostructured Surfaces funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/adfm.200701155

Publication URI: http://dx.doi.org/10.1002/adfm.200701155

Type: Journal Article/Review

Parent Publication: Advanced Functional Materials

Issue: 13