Fullerene Resist Materials for the 32 nm Node and Beyond (2008)

First Author: Gibbons F
Attributed to:  Materials Program Platform Grant: Nanostructured Surfaces funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/adfm.200701155

Publication URI: http://dx.doi.org/10.1002/adfm.200701155

Type: Journal Article/Review

Parent Publication: Advanced Functional Materials

Issue: 13