Defects at Ge:GeO2 and Ge:MeOx interfaces (2013)
Attributed to:
High permittivity dielectrics on Ge for end of Roadmap application
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2013.03.111
Publication URI: http://dx.doi.org/10.1016/j.mee.2013.03.111
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering