Dust grain charging in RF discharges (2010)

First Author: Bacharis M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/19/2/025002

Publication URI: http://dx.doi.org/10.1088/0963-0252/19/2/025002

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 2