High-power impulse magnetron sputtering and its applications (2010)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1351/pac-con-09-10-43
Publication URI: http://dx.doi.org/10.1351/pac-con-09-10-43
Type: Journal Article/Review
Parent Publication: Pure and Applied Chemistry
Issue: 6