Distance-dependent plasma composition and ion energy in high power impulse magnetron sputtering (2010)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/43/27/275204
Publication URI: http://dx.doi.org/10.1088/0022-3727/43/27/275204
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 27