Spin-on doping of germanium-on-insulator wafers for monolithic light sources on silicon (2015)
Attributed to:
Manufacturing Quantum Nano-LEGO Blocks for Electronics, Photonics, and Phononics Integrated Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.7567/jjap.54.052101
Publication URI: http://dx.doi.org/10.7567/jjap.54.052101
Type: Journal Article/Review
Parent Publication: Japanese Journal of Applied Physics
Issue: 5