Review on Non-Volatile Memory with High-k Dielectrics: Flash for Generation Beyond 32 nm. (2014)
Attributed to:
Liquid injection ALD of Cp- based precursors for deposition of dielectric materials
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.3390/ma7075117
PubMed Identifier: 28788122
Publication URI: http://europepmc.org/abstract/MED/28788122
Type: Journal Article/Review
Volume: 7
Parent Publication: Materials (Basel, Switzerland)
Issue: 7
ISSN: 1996-1944