Ce(IV) complexes with donor-functionalized alkoxide ligands: improved precursors for chemical vapor deposition of CeO2. (2011)

First Author: Aspinall HC
Attributed to:  Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/ic201593s

PubMed Identifier: 22017450

Publication URI: http://europepmc.org/abstract/MED/22017450

Type: Journal Article/Review

Volume: 50

Parent Publication: Inorganic chemistry

Issue: 22

ISSN: 0020-1669