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A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope (2014)

First Author: Hu Z

Attributed to: A Stable Parametrically Amplified Gyroscope funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/24/12/125003

Publication URI: http://dx.doi.org/10.1088/0960-1317/24/12/125003

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12