Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system (2015)

First Author: Obradovic M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2015.03.074

Publication URI: http://dx.doi.org/10.1016/j.tsf.2015.03.074

Type: Journal Article/Review

Parent Publication: Thin Solid Films