Comparison of oxygen vacancy defects in crystalline and amorphous Ta2O5 (2015)

First Author: Guo Y

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2015.04.065

Publication URI: http://dx.doi.org/10.1016/j.mee.2015.04.065

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering