Comparison of oxygen vacancy defects in crystalline and amorphous Ta2O5 (2015)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2015.04.065
Publication URI: http://dx.doi.org/10.1016/j.mee.2015.04.065
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering