Optical lithography technique for the fabrication of devices from mechanically exfoliated two-dimensional materials (2016)

First Author: Zhang R
Attributed to:  Graphene Micro-sensors for Adaptive Acoustic Transduction (GMAAT) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2016.01.038

Publication URI: http://dx.doi.org/10.1016/j.mee.2016.01.038

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering