Fabrication and characterisation of suspended microstructures of tantalum (2017)

First Author: Al-Masha'al A
Attributed to:  A multichannel adaptive integrated MEMS/CMOS microphone funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/27/1/015020

Publication URI: http://dx.doi.org/10.1088/0960-1317/27/1/015020

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 1